| 摘要 |
PROBLEM TO BE SOLVED: To provide a control valve which includes a high precision and high responsive valve element and is free from lowering in durability caused by a working fluid to be used. SOLUTION: The control valve 22 is intervened in a valve passage 47 in which a corrosive working fluid flows and includes a valve element 43. The valve element 43 is inserted in a guide member 42 for a valve and one end side is arranged in the valve passage 47 and another end side is arranged in a back pressure chamber 59 of a valve side and a communication passage 61 for communicating the valve passage 47 with the back pressure chamber 59 of the valve side is arranged therein. The valve element 43 receives a secondary pressure p<SB>2</SB>of a secondary side of the valve passage 47 on a first pressure receiving surface P1 and receives the secondary pressure p<SB>2</SB>introduced to the back pressure chamber 59 via the communication passage 61 by a second pressure receiving surface P2. A bearing member 44 is arranged between a guide member 42 for the valve and the valve element 43 and an O-ring 57 and a diaphragm 58 are arranged on both sides of the bearing member 44 for the valve. COPYRIGHT: (C)2011,JPO&INPIT
|
