| 发明名称 |
ACTUATOR, LITHOGRAPHIC APPARATUS, AND ACTUATOR CONSTRUCTING METHOD |
| 摘要 |
An actuator includes a coil; a cooling body configured to cool the coil; a quantity of heat transfer material fixedly arranged between the cooling body and the coil, and a mechanical attacher configured to attach the coil to the cooling body.
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| 申请公布号 |
US2011063063(A1) |
申请公布日期 |
2011.03.17 |
| 申请号 |
US20100880849 |
申请日期 |
2010.09.13 |
| 申请人 |
ASML NETHERLANDS B.V. |
发明人 |
KOOPS RODY;VOSTERS PETRUS MATHIJS HENRICUS;STADHOUDERS FRANCISCUS |
| 分类号 |
H01F27/08;B23P19/00 |
主分类号 |
H01F27/08 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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