发明名称 REFLOW DEVICE AND REFLOW METHOD
摘要 PROBLEM TO BE SOLVED: To provide a reflow device and a reflow method that only use electric energy and an amount of nitrogen corresponding to an amount of production of an object to be subjected to reflow processing to reduce costs, and can maintain the quality of the object and save space. SOLUTION: The reflow device 1 includes a rotary table device 4 which has a table 6 mounted with a plurality of reflow furnaces 10 each configured to heat an object W held by a fixture 300, and can index the respective reflow furnaces 10 on the table 6, and the reflow furnaces 10 each include a chamber 21 which is disposed on the table 6 to store the object W held by the fixture 300 and can seal the object W with the fixture 300, and a heating means 22 which is disposed on the table 6 to heat the object W sealed in the chamber 21. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011054865(A) 申请公布日期 2011.03.17
申请号 JP20090204376 申请日期 2009.09.04
申请人 TOSHIBA CORP 发明人 MORIYA NOBUYUKI;USHIJIMA AKIRA
分类号 H05K3/34;B23K1/008;B23K101/36 主分类号 H05K3/34
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