Verfahren zur Herstellung einer Mikrostruktur, und Verfahren zur Herstellung eines Flüssigkeitsausstosskopfes

摘要

The present invention discloses a method of producing a liquid flow path shape capable of refilling ink at a high speed by optimizing a three-dimensional shape of the liquid flow path and suppressing the vibration of a meniscus and a head thereof. According to the invention, a pattern to form the liquid flow path to be formed on a substrate with a heater is formed by a positive photosensitive material in a two-layered structure of upper and lower layers and the lower layer is used for forming the liquid flow path after being thermally crosslinked.