| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric actuator, capable of highly correctly forming electrodes in a short time as much as possible. <P>SOLUTION: In manufacturing the piezoelectric actuator, first, a plurality of individual electrodes 43 are formed on the upper surface of a diaphragm 41 followed by forming a piezoelectric layer 42 on the upper surface of the diaphragm 41 so as to cover the individual electrodes 43 (individual electrode forming step). Then, a conductive film 51 is formed on almost entire region of the upper surface of the piezoelectric layer 42 (conductive film forming step) followed by cutting out a common electrode 44 from the conductive film 51 by laser processing (laser processing step). In the laser processing step, output energy of laser is made larger and the scanning speed of the laser is made faster in cutting out a connection 44b and a coupling part 44c than in cutting out a plurality of opposite parts 44a. Also, in this case, a residual part of the conductive film 51 from which the common electrode 44 is cut out is used as a common electrode 45. <P>COPYRIGHT: (C)2011,JPO&INPIT |
