| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cross-sectional processing observation apparatus which can efficiently and continuously carry out execution of a cross-sectional processing and observation by a focused ion beam device that does not include SEM device. <P>SOLUTION: The cross-sectional processing and observation method forms a cross-section on a sample by an etching process by the focused ion beam; acquires the cross-sectional observation image by cross-sectional observation by the focused ion beam; forms a new cross-section by carrying out the etching process on a region including the cross-section; and acquires the cross-sectional observation image of the new cross-section. In this case, the cross-sectional processing observation method acquires a surface observation image by having a focused ion beam irradiated on the region including a mark on the sample and the cross-section, recognizes the position of the mark in surface observation image and then applying the etching process to the cross-section of the sample, by setting the irradiation region for the focused ion beam for forming the new cross-section with the position of the mark as a reference. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
