| 摘要 |
PROBLEM TO BE SOLVED: To accurately detect without being affected by wind a discharge state of solution discharged from a nozzle of a coating head in an application apparatus of a solution. SOLUTION: In the application apparatus of a solution, by which a solution is discharged from a nozzle installed in a coating head 20 and is applied to a substrate 1, there are provided: a detection means 30 that detects a discharge state of the solution discharged from the nozzle of the coating head 20; and a windshield means 40 that prevents wind from entering a discharge region of the solution discharged from the nozzle of the coating head 20. COPYRIGHT: (C)2011,JPO&INPIT
|
