发明名称 METHOD FOR MANUFACTURING ELECTROMAGNETIC WAVE CONTROL MATERIAL AND ELECTROMAGNETIC WAVE CONTROL MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide a simple method for manufacturing an electromagnetic wave control material having excellent conductivity and including metal wiring that can be formed in a fine pattern as designed and has a uniform shape, and to provide an electromagnetic wave control material. SOLUTION: A method for manufacturing an electromagnetic wave control material 20 including a substrate layer 22 and metal wiring 24 formed on a surface of the substrate layer 22 includes the steps of: forming a metal layer 24a with a thickness of 40-2,000 nm on a surface of a substrate layer 22 wherein the metal layer contains at least a specific metal; forming a self-assembled monolayer 26 containing a specific compound on a surface of the metal layer 24a; covering at least partially a surface of the self-assembled monolayer 26 with a resin layer 28; and forming metal wiring 24 by etching and removing a part of the metal layer 24a, where the metal layer 24a is not covered with the resin layer 28. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011054686(A) 申请公布日期 2011.03.17
申请号 JP20090200747 申请日期 2009.08.31
申请人 ASAHI KASEI E-MATERIALS CORP;TOHOKU UNIV;NOF CORP 发明人 KAWASHIMA MASAHIKO;NAKAGAWA MASARU;OTAKE TOMOYUKI;TAKAOKA TOSHIAKI
分类号 H05K9/00;B32B15/08 主分类号 H05K9/00
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