发明名称 SUPPORTING DEVICE, OPTICAL APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
摘要 A supporting device that supports an optical element in a gravitational force direction, the supporting device comprises: a supporting member to be connected via an adhesive to an outer circumference of the optical element, the supporting member including a plurality of members each of which has a projection for supporting the optical element. Each of the plurality of members is arranged to have a rigidity lower than that of the adhesive in a direction orthogonal to the gravitational force direction.
申请公布号 US2011065051(A1) 申请公布日期 2011.03.17
申请号 US20100876940 申请日期 2010.09.07
申请人 CANON KABUSHIKI KAISHA 发明人 SUDOH YUJI
分类号 G03F7/20;G02B7/02 主分类号 G03F7/20
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