发明名称 SUBSTRATE TREATMENT DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of giving a notice to a user to prevent an improper removal of a removable recording medium, and capable of performing confirmation on whether the recording medium can be removed on a manipulation screen. <P>SOLUTION: A substrate treatment device comprises a control means for displaying the manipulation screen for manipulating information on substrate treatment and an output means of outputting the information to a removable external storing device. In the substrate treatment device, the control means performs control so that a button for removing the fitted external storing device is disposed at a place where the button can be depressed when the external storing device has been fitted, and performs control to prevent the button from being depressed when the external storing device has not been fitted. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011054619(A) 申请公布日期 2011.03.17
申请号 JP20090199736 申请日期 2009.08.31
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 NAKAGAWA YOSHIHIKO
分类号 H01L21/027;H01L21/205 主分类号 H01L21/027
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