| 摘要 |
<p>Disclosed is a drying device that prevents the dry state of coating liquids such as resist solutions from losing uniformity due to the influence of a plurality of support pins when a mother substrate for holding a plurality of display panels is supported by the support pins, even in cases which the support pins are disposed in sections that become display regions. The drying device is equipped with a closed container (2) in which the plurality of support pins (9, 10) that support the underside of the mother substrate (100) have been disposed in the interior, an exhaust pump (P1) for evaporating a solvent from a coating liquid upon the mother substrate (100) by making the interior of the closed container (2) a decompressed state at atmospheric pressure or lower, and a gas supply pump (P2) that returns the interior of the decompressed closed container (2) to an atmospheric pressure state by supplying gas to the interior of the closed container (2); and from among the plurality of support pins (9, 10), the support pins (9) that are disposed in sections that become display regions formed on the mother substrate (100) are provided with a pin heating means (31) and a pin cooling means (21) that heat and cool the support pins (9).</p> |
