| 摘要 |
PROBLEM TO BE SOLVED: To provide a gravure coating device capable of manufacturing a thin film having a more uniform film thickness as compared to a conventional gravure coating device, and to provide a method of manufacturing the thin film by using the gravure coating device. SOLUTION: The gravure coating device includes: a liquid tank for storing coating liquid; at least one coating liquid supply port arranged on the side wall of the liquid tank; a gravure roll arranged at the upper part of the liquid tank so that at least a part of the lower side half of the peripheral surface is immersed in the coating liquid; and at least two straightening partitions arranged in the liquid tank so as to partition the coating liquid between the coating liquid supply port and the gravure roll and provided with an opening for fluid-connecting the partitioned coating liquid. In the method of manufacturing the thin film, the device is used. COPYRIGHT: (C)2011,JPO&INPIT |
