发明名称 SEMICONDUCTOR APPARATUS AND METHOD FOR MANUFACTURING SAME
摘要 In one embodiment, a semiconductor apparatus is disclosed. The apparatus includes: an element-isolation insulating film formed on a major surface of a semiconductor layer, the element-isolation insulating film having a first opening and a second opening; an n-type MOSFET provided in the first opening; and a p-type MOSFET provided in the first opening. An upper face of a portion of the element-isolation insulating film adjacent to a source/drain region of the n-type MOSFET is positioned below an upper face of the source/drain region of the n-type MOSFET. An upper face of a portion of the element-isolation insulating film adjacent to a source/drain region of the p-type MOSFET is positioned above an upper face of the source/drain region of the p-type MOSFET.
申请公布号 US2011062527(A1) 申请公布日期 2011.03.17
申请号 US20100876596 申请日期 2010.09.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SHINO TOMOAKI;NOGUCHI MITSUHIRO
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
代理机构 代理人
主权项
地址