| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent damage caused by a barrier substance by shortening time necessary for releasing the clamp of a workpiece. <P>SOLUTION: An electrostatic clamp optimizing tool is embodied by a system which controls, monitors and optimizes an electrostatic clamp. A computer 16, a control circuit 22 and at least one amplifier 28 are provided. A signal evaluating circuit 25 is provided, which is used to apply a detection signal to an output signal of the control circuit. The signal evaluating circuit includes circuit elements providing the detection signal for monitoring an electric capacity of the electrostatic clamp, and monitoring performances of the electrostatic clamp and providing performance information to the control circuit. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
