| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for easily adjusting the direction of a scriber shank. SOLUTION: A scriber shank 3 constituting a scribe means 6 is attached to a scriber device 4, equipped with a holding table 5 for holding a workpiece and a scribe means 6 for scribing the workpiece held on the holding table 5, a mirror 7 is mounted on the holding table 5, and a diamond tip 31 is reflected on the mirror 7, the diamond tip 31 is observed, by using a reflected image acquisition means for acquiring the image of the diamond tip 31 reflected on the mirror 7, and then the direction of a ridgeline 33a, forming a predetermined processing point 34a out of a plurality of processing points 34a, 34b, and 34c is aligned with the scribe direction by adjusting the direction of a diamond shank 3. Since the direction of the ridgeline can be adjusted via the mirror, the direction of the ridgeline can be adjusted correctly and quickly. COPYRIGHT: (C)2011,JPO&INPIT |
