发明名称 PIEZOELECTRIC ACTUATOR AND METHOD FOR PRODUCING THE SAME
摘要 A method for producing a piezoelectric actuator has the following steps: providing a plurality of piezoelectric material layers (2) which can be assembled into a stack; applying electrode layers (3) each having a recess (4, 4′) to the plurality of piezoelectric material layers, such that an alternating sequence of piezoelectric material layers and electrode layers is formed in the stack, wherein electrode layers with a recess (4) in a first recess zone and electrode layers with a recess (4′) in a second recess zone which differs from the first recess zone are alternatingly formed in the stack; and providing a stress-relieving material (5) in the first and second recesses, the stress-relieving material exhibiting electrically insulating properties after the stack is sintered, and preventing the individual material layers from adhering to one another.
申请公布号 US2011062830(A1) 申请公布日期 2011.03.17
申请号 US20100954245 申请日期 2010.11.24
申请人 SCHROEDER MARTIN;WEIGL MANFRED 发明人 SCHROEDER MARTIN;WEIGL MANFRED
分类号 H01L41/083;H01L41/273 主分类号 H01L41/083
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