SYSTEM AND METHOD FOR GENERATING A BEAM OF PARTICLES
摘要
<p>A method of fabricating a film. The method comprises directing onto a substrate a pulsed supersonic beam of a molecular precursor characterized by kinetic energy of at least 1 eV per molecule, such that non-volatile species of molecules of the precursor are deposited on the substrate.</p>
申请公布号
WO2011030326(A1)
申请公布日期
2011.03.17
申请号
WO2010IL00528
申请日期
2010.06.30
申请人
RAMOT AT TEL-AVIV UNIVERSITY LTD.;EVEN, UZI;LAVIE, NACHUM;PATOLSKY, FERNANDO
