| 摘要 |
A method for measuring surface properties according to the present invention includes the steps of: with distance control feedback applied so that a desired physical quantity to be measured that is attributed to an interaction between a probe and a sample is actually measured while changing a measured distance between the probe and the sample in accordance with a relationship between the desired physical quantity and the measured distance, (i) setting a set value, corresponding to the desired physical quantity, which serves to change the measured distance; and (ii) recording, for each set value thus set, a relationship between the measured distance changed by the set value set in the step (i) and a physical quantity measured with the probe and the sample placed at that measured distance. This allows precise and quick measurement of a physical quantity even in a region where the probe and the sample are very close to each other, while avoiding a collision between them. |
