DRY-ETCHING METHOD AND APPARATUS,申请号KR20050016386-传众专利搜索

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发明名称	DRY-ETCHING METHOD AND APPARATUS
摘要
申请公布号	KR101021665(B1)	申请公布日期	2011.03.17
申请号	KR20050016386	申请日期	2005.02.28
申请人		发明人
分类号	H01L21/3065;C23F1/00;C23F4/00;H01J37/32;H01L21/302;H01L21/311	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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