COATING APPARATUS FOR PARYLENE AND PRODUCTION METHOD OF SEQUENTIALLY LAYERED PARYLENE FILMS OR PARYLENE FILM WITH CONTROLLED COMPOSITION OF MIXED PARYLENE MONOMERS USING SAID COATING APPARATUS,申请号KR20090052787-传众专利搜索

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发明名称	COATING APPARATUS FOR PARYLENE AND PRODUCTION METHOD OF SEQUENTIALLY LAYERED PARYLENE FILMS OR PARYLENE FILM WITH CONTROLLED COMPOSITION OF MIXED PARYLENE MONOMERS USING SAID COATING APPARATUS
摘要
申请公布号	KR101021682(B1)	申请公布日期	2011.03.17
申请号	KR20090052787	申请日期	2009.06.15
申请人		发明人
分类号	H01L21/205;C23C16/22;C23C16/452	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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