| 摘要 |
PROBLEM TO BE SOLVED: To provide a seed holding member which has a recessed part for folding and separating at an optional position thereby causes stress concentration at the recessed part when receiving breaking load, consequently can be folded with a smaller load than that of a conventional one, and which propagates the breaking along the recessed part to thereby prevent cracks from being propagated to an unintended place of the seed holding member, so that the manhour necessary for the separation work of the polycrystalline silicon from the seed holding member is reduced, and to provide a method for producing the polycrystalline silicon using the seed holding member. SOLUTION: The graphite-made seed holding member is mounted on the bottom of a furnace for producing the polycrystalline silicon by a Siemens method and holds the lower end part of a seed 4 to become a seed rod. A folding and separating groove 16 is formed on the outer circumferential surface of the graphite-made seed holding member 6. The seed holding member 6 includes: a cylindrical pedestal part 6a having a first fitting hole 10 into which an electrode part 5 is inserted; a cylindrical drum part 6b having smaller diameter than that of th pedestal part 6a; and a truncated tip part 6c continuing to the drum part 6b and having a second fitting hole 13 into which the lower end part of the seed 4 is inserted. COPYRIGHT: (C)2011,JPO&INPIT |
