| 摘要 |
By making use of a vertical cavity surface emitting laser element (100) in accordance with the present invention, it becomes able to suppress as properly an occurrence of any dislocation therein even in a case where there is formed a DBR mirror onto a substrate (1), by designing to be set for between an average of strain in a DBR mirror at the lower side thereof (2) and a layer thickness of such the DBR mirror at the lower side thereof (2) in reference to a curvature of the substrate (1) in order to be satisfied a predetermined condition, and then by performing an addition of nitrogen into the DBR mirror at the lower side thereof (2) with a composition thereof that corresponds to the designed average of strain in the DBR mirror at the lower side thereof (2) to be set therefor, such as the composition of between 0.028% and 0.390% or the like, in reference to the relationship of between the average of strain in the DBR mirror at the lower side thereof (2) and an average of the composition of the nitrogen that is included in the DBR mirror at the lower side thereof (2).
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