发明名称 CUTTING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To easily detect a narrow gap caused by attaching cutting waste around the gap constituting an air curtain without such a complicated operation as dismounting a cutting blade, in an air-spindle unit where the cutting blade is mounted. <P>SOLUTION: An air curtain 75 is formed by ejecting air for an air bearing from a gap 74 formed in between a cap 83 at the extremity of a housing 80 in an air-spindle unit 70 and a blade mount 66 mounted at the extremity of a rotating shaft 90 in the housing 80, for the purpose of preventing a cutting liquid from entering into the gap 74. An air-compressing chamber 833 is formed inside the cap 83 to pass through the air just before the air curtain 75 is formed, and the pressure in the air-compressing chamber 833 is detected by a pressure sensor 85. When the pressure rises, it is determined that the gap 74 is narrowed by the attached cutting waste. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011054847(A) 申请公布日期 2011.03.17
申请号 JP20090203997 申请日期 2009.09.03
申请人 DISCO ABRASIVE SYST LTD 发明人 HASHIMOTO HIROKIMI
分类号 H01L21/301 主分类号 H01L21/301
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