| 摘要 |
PROBLEM TO BE SOLVED: To provide a wire routing structure of a Z-axis unit in a substrate inspection device configured to route a measurement line or the like while maintaining an immovable state even when a probe is moved in a Z-axis axial direction so as not to cause disconnection. SOLUTION: A slide unit 23 is arranged in a manner allowing forward and backward movement in the Z axial direction at a base table part 12 side constituting a Z-axis unit 11 provided at a movable part 51 of an X-Y unit. The measurement line 45 which is drawn out from the probe 42 held with its contact end 42a directed toward a movement direction of the slide unit 23 and which is connected to an external output connector 49 at the base table part 12 side and an earth line 48 electrically connecting a space between the base table part 12 side and the slide unit 23 are provided. At least the measurement line 45 is wired by being divided into two in a manner allowing an immovable posture even when the probe 42 is moved. The contact 26a is closed only during probing to electrically connect the both, thereby preventing disconnection. COPYRIGHT: (C)2011,JPO&INPIT |
