| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator capable of equalizing the potential of each of two kinds of common electrodes disposed on the same plane of a piezoelectric layer. <P>SOLUTION: Common electrode 44, 45 are disposed on the upper surface of a piezoelectric layer 42. The common electrode 44 includes: a plurality of opposite parts 44a opposing a substantial center of a plurality of individual electrodes 43 arranged in two rows in a sheet forwarding direction, two connections 44b for connecting the opposite parts 44a of each row, and a coupling part 44c for coupling the upper ends of the two connections 44b to each other. The common electrodes 45 are disposed so as to be surrounded in three directions by the two connections 44b and the coupling part 44c. Wirings 47a-47d led out to the upper surface of a diaphragm 41 are connected to the common electrodes 44, 45. Of the wirings, a wiring 47e is connected to the common electrode 44 via a through-hole 46a formed on the insulating layer on the upper surface of an insulating layer disposed on the upper surface of the piezoelectric layer 42 so as to cover the common electrodes 44, 45, and extends over the coupling part 44c. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
