| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electroplating tool having excellent durability compared to the conventional one. <P>SOLUTION: The electroplating tool has: a wiring member 2 having energizing parts 21, 22 comprising at least one of copper and a copper alloy and electrically connected to a member to be treated and a wiring part 23 for supplying current to the energizing parts 21, 22; a supporting body 1 at least one of which is formed from a metal and which supports the wiring member 2 and a material to be treated and a protective containing film for covering the metal part of the supporting body 1; and the wiring part 2 to have 50-1,000μm thickness with a tetrafluoroethylene copolymer having 100-220°C melting point. Because the tetrafluoroethylene having excellent stability is used as a coating film, the influence on the electroplating tool due to the plating solution is suppressed. Also, because the tetrafluoroethylene copolymer has 100-220°C melting point, the protective coating film is formed in a melting state to form the excellent protective coating film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
