| 摘要 |
Disclosed is a method for manufacturing a photovoltaic device. The method comprising: forming a first electrode on a substrate; forming a first unit cell on the first electrode, the first unit cell comprising an intrinsic semiconductor layer; forming an intermediate reflector on the first unit cell, the intermediate reflector comprises a plurality of sub-layers stacked alternately by modulating applied voltages in accordance with time, the applied voltages exciting plasma and having mutually different frequencies; forming a second unit cell on the intermediate reflector, the second unit cell comprising an intrinsic semiconductor layer; and forming a second electrode on the second unit cell.
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