| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming a carbon film containing one or more metal elements selected from Ti, Nb, Zr, Hf and Ta with a content (at%) of 2/3 times or less of carbon on a surface of a titanium substrate, with excellent productivity, as a corrosion-resistant film for imparting an effect of maintaining low contact resistance for a long period of time to a surface of a separator in a fuel cell by covering the surface. <P>SOLUTION: This film-forming method includes: vaporizing an evaporation source 2 including the metal elements by applying a bias voltage of -50 to -300 V to a substrate W and performing arc discharge in an atmospheric gas containing a rare gas and a carbon-containing gas with a flow rate of 1/3 to 2 of the rare gas; generating a plasma of the atmospheric gas and the metal elements; forming magnetic lines of force, which diverge almost orthogonally to or travel in parallel to the evaporation surface of the evaporation source 2 and reach the vicinity of the substrate W, with a magnetic-field-forming means 3; and thereby supplying the plasma to the surface of the substrate W. By enhancing the plasma density in the vicinity of the substrate W, a film-forming rate of the metal is reduced and the metal-containing carbon film which mainly contains carbon is formed. <P>COPYRIGHT: (C)2011,JPO&INPIT |
