| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing device capable of carrying out polishing with higher accuracy. <P>SOLUTION: The polishing device carries out polishing of a workpiece W by pressing the workpiece W to a polishing cloth 11 through an elastic sheet body 36 with a pressing force to a carrier 28 by a second pressing means and an inner pressure force of a first fluid chamber 38 by fluid supplied to the first fluid chamber 38. The fluid downwardly supplied into the first fluid chamber 38 flows horizontally outward in the first fluid chamber 38, strikes a side wall 22a of a recess 23 to flow upward, and is discharged outward from each fluid discharge port 44, so that a fluid supply member 31 keeps parallelism with the elastic sheet body 36 by moving to follow the movement of the elastic sheet body 36 and centering is carried out in the first fluid chamber 38. <P>COPYRIGHT: (C)2011,JPO&INPIT |
