HIGH ORIENTATION ALUMINUM NITRIDE CRYSTAL FILM AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a highly oriented aluminum nitride polycrystalline film comprising an aggregate of c-axis oriented aluminum nitride single crystals and having excellent crystallinity and denseness.

SOLUTION: An aluminum nitride composite film 10 is produced by precipitating aluminum nitride 1 at 150 to 500°C by sputtering on a base material 6 comprising a single crystalα-Al2O3substrate 3 and an aluminum nitride crystal film 5 formed thereon via an aluminum oxynitride layer 4, and subsequently annealing at a temperature higher than the reaction sputtering temperature and in a range from 250 to 800°C to form a highly oriented aluminum nitride polycrystalline film 1. The highly oriented aluminum nitride polycrystalline film 1 produced by the above method includes an aggregate of c-axis oriented aluminum nitride single crystals 2, and the highly oriented aluminum nitride polycrystalline film has a tilt angle of 30 to 1,300 arcsec and a twist angle of 80 to 4,000 arcsec.

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