MAGNESIUM OXIDE FILM, FORMING METHOD THEREOF, AND PLASMA GENERATION ELECTRODE

摘要

PROBLEM TO BE SOLVED: To provide a magnesium oxide film capable of making discharge starting voltage of an electrode low in case of use as an electrode protection film, and of reduced manufacturing cost. SOLUTION: The magnesium oxide film 1 is provided with an aggregate 6 of a magnesium oxide thin film part 4 and magnesium oxide plate crystal 5 growing from the surface of and integrated with the magnesium oxide thin film part 4. The magnesium oxide film 1 is formed by growing magnesium oxide plate crystal 5 on the surface of the magnesium oxide thin film part 4 by the chemical gas phase deposition method (the CVD method) under an open atmosphere, on the surface of a base layer 3 formed by coating magnesium compound solution generating magnesium oxide by thermal decomposition on a surface of a base material 2 and heat-treating it. A plasma generation electrode using the magnesium oxide film 1 as an electrode protection film has a discharge starting voltage lowered by 30% or more as compared with a conventional one. COPYRIGHT: (C)2011,JPO&INPIT