| 摘要 |
PURPOSE: A liquid processing apparatus of a substrate, a method for generating processing liquid, and a computer readable recording medium storing a program for generating processing liquid are provided to generate processing liquid of a preset concentration and to supply the processing liquid to a substrate processing unit, thereby uniformly processing a substrate. CONSTITUTION: A plurality of substrate processing units(11~22) processes a substrate(2) using processing liquid. A processing liquid generating unit(24) generates processing liquid of a preset concentration by dissolving a gas in a solvent. The processing liquid generating unit comprises a solvent supply pipe(35) and a dissolution flow path(36) for supplying the solvent. The dissolution flow path dissolves the gas in the solvent supplied from the solvent supply pipe. A controller(25) controls the substrate processing units and the processing liquid generating unit.
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