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发明名称
SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER AND METHOD OF MANUFACTURING A DEVICE USING LITHOGRAPHIC APPARATUS.
摘要
申请公布号
NL2005166(A)
申请公布日期
2011.03.17
申请号
NL20102005166
申请日期
2010.07.29
申请人
ASML NETHERLANDS B.V.
发明人
YAKUNIN, ANDREI;KAMPEN, MAARTEN;TIMOSHKOV, VADIM
分类号
G03F7/20;G21K1/06
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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