发明名称 Use of metal-organic frame materials for producing microelectronic components
摘要 Use of metal-organic framework material exhibiting no metal-metal bonding in a solid body, for the production of micro-electronic component, is claimed. An independent claim is also included for producing the microelectronic component, comprising applying a layer consisting the metal-organic framework material on a substrate.
申请公布号 EP2296171(A2) 申请公布日期 2011.03.16
申请号 EP20100174650 申请日期 2010.08.31
申请人 BASF SE 发明人 CZAJA, ALEXANDER;MALKOWSKY, ITAMAR MICHAEL;LEUNG, EMI;MUELLER, ULRICH
分类号 H01L21/312 主分类号 H01L21/312
代理机构 代理人
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