发明名称 |
Use of metal-organic frame materials for producing microelectronic components |
摘要 |
Use of metal-organic framework material exhibiting no metal-metal bonding in a solid body, for the production of micro-electronic component, is claimed. An independent claim is also included for producing the microelectronic component, comprising applying a layer consisting the metal-organic framework material on a substrate. |
申请公布号 |
EP2296171(A2) |
申请公布日期 |
2011.03.16 |
申请号 |
EP20100174650 |
申请日期 |
2010.08.31 |
申请人 |
BASF SE |
发明人 |
CZAJA, ALEXANDER;MALKOWSKY, ITAMAR MICHAEL;LEUNG, EMI;MUELLER, ULRICH |
分类号 |
H01L21/312 |
主分类号 |
H01L21/312 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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