| 摘要 |
A microgryroscope for determining rotational movements about an x, y or z axis. At least one anchor is fastened to a substrate. A plurality of, in particular four, masses that oscillate radially with respect to the anchor are fastened to the anchor by springs. Drive elements are used to vibrate at least individual ones of the masses in an oscillatory manner in the x or y direction in order to produce Coriolis forces when the substrate is deflected. Sensor elements are used to detect deflections of the masses on account of the Coriolis forces produced. The oscillating masses are connected to at least one additional, non-oscillating mass which can, however, rotate together with the oscillating masses on the substrate about the at least one anchor. A further sensor element is associated with this additional mass. |
