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发明名称
EPITAXIAL DEPOSITION REACTOR
摘要
申请公布号
US3621812(A)
申请公布日期
1971.11.23
申请号
USD3621812
申请日期
1969.06.18
申请人
TEXAS INSTRUMENTS INC.
发明人
GEORGE E. HISSONG JR.;WARREN RICE
分类号
C30B25/14;(IPC1-7):C23C11/00
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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