| 摘要 |
PURPOSE: A switch valve assembly is provided to send waste gas generated in a semiconductor process to a main collection tank and a sub collection tank by installing a branch area of a pipeline. CONSTITUTION: An inner casing(10) includes a pipe shaped valve receiver(11), a first connection hole(13), and a second connection hole(15). A valve body(30) is rotatably installed in the valve receiver. A first sealing member mounting unit(35) is formed on the outer surface of the valve body. A driving unit(50) reciprocates the valve body between a first connection position and a second connection position. A sealing member(70) is arranged between the valve body and the inner casing.
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