| 摘要 |
PROBLEM TO BE SOLVED: To provide a heating element of long life and low manufacturing cost of which corrosive gas is hard to permeate even under the environment of high temperature and corrosive gas, capable of avoiding degradation due to corrosion of a conductive layer, especially a power feeding terminal. SOLUTION: A heating element 10 comprises at least a heat resistant base material 1, a conductive layer 3 comprising a heater pattern 3a formed on the heat resistant base material, and an insulating protective layer 4 formed on the conductive layer. A corrosion resistant layer 4p of which nitrogen gas permeability is 1×10<SP>-2</SP>cm<SP>2</SP>/sec or less is provided at least on the protective layer 4. COPYRIGHT: (C)2008,JPO&INPIT |
