LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

摘要

Disclosed is a laser processing apparatus for processing a substrate to be processed which is used for a solar cell.  The laser processing apparatus comprises a holding part (65) for holding a substrate (60) to be processed, a laser oscillator (1) which irradiates the substrate (60) with a laser light (L) and processes the substrate (60), and a moving mechanism (5) for moving the irradiation position of the laser light (L) relative to the substrate (60) held by the holding part (65).  The laser processing apparatus is also provided with a coating mechanism (10) for sequentially applying a protective material onto portions of the substrate (60) which are processed by the laser light (L).