ES-CHUCK CARRIER AND VACUUM PROCESSING APPARATUS USING THE SAME

摘要

PURPOSE: An electrostatic chuck carrier and a vacuum process device for a substrate using the same are provided to prevent the substrate from falling by rotating a falling prevention guide with a hinge. CONSTITUTION: An absorbing unit(141) adsorbs a substrate with electrostatic force. A falling prevention guide(143) is prepared on one side of the absorbing unit to prevent the substrate absorbed in the absorbing unit from falling. A movement supporting unit(142) is separated from the absorbing unit. The movement support unit is movably installed in a conveyor roller(105). A chucking part(146) is chucked by a chucking unit.