发明名称 Thin film transistor and method of manufacturing the same
摘要 A thin film transistor includes a polysilicon layer formed over a substrate having a channel region, a source region and a drain region, a conductive layer formed in an upper layer of the polysilicon layer for covering at least a part of the source region and the drain region, an interlayer insulating film formed in a region to cover at least a region including the polysilicon layer, a contact hole formed to penetrate the interlayer insulating film with a depth to expose the conductive layer and a wiring layer formed along a sidewall of the contact hole.
申请公布号 US7906779(B2) 申请公布日期 2011.03.15
申请号 US20070946309 申请日期 2007.11.28
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 YAMAYOSHI KAZUSHI
分类号 H01L29/04;H01L29/10;H01L31/036 主分类号 H01L29/04
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