发明名称 POLISHING AGENT FOR SYNTHETIC QUARTZ GLASS SUBSTRATE
摘要 <p>Disclosed is a polishing agent for synthetic quartz glass substrates, which is characterized by containing a colloidal solution of a colloidal silica or the like having a colloid concentration of 20-50% by mass, and a polycarboxylic acid polymer, an acidic amino acid, a phenol or a glycosaminoglycan.</p>
申请公布号 KR20110026406(A) 申请公布日期 2011.03.15
申请号 KR20107006926 申请日期 2009.05.27
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 HARADA DAIJITSU;TAKEUCHI MASAKI;SHIBANO YUKIO;UEDA SHUHEI;WATABE ATSUSHI
分类号 C09K3/14;B24B37/00 主分类号 C09K3/14
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