VACUUM MECHANICAL ROTATION-TRANSMITTING APPARATUS

摘要

PURPOSE: A rotating transmission apparatus of a vacuum apparatus is provided to offer torque of the input and output shaft assembly by generating the magnetic force between first and second magnet units. CONSTITUTION: An output shaft assembly(6) is expanded toward the input shaft assembly and the vacuum chamber side. A spacer part(2) is arranged between the input shaft assembly and the output shaft assembly. A plurality of first magnetic units(33) is arranged on the input shaft assembly. A plurality of second magnetic units(43) is arranged on the output shaft assembly.