METHODE ZUR ÜBERWACHUNG DER ÄTZTIEFE,申请号AT20030759493T-传众专利搜索

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发明名称	METHODE ZUR ÜBERWACHUNG DER ÄTZTIEFE
摘要
申请公布号	AT499701(T)	申请公布日期	2011.03.15
申请号	AT20030759493T	申请日期	2003.09.18
申请人	LAM RESEARCH CORPORATION	发明人	KAMP, TOM;MILLER, ALAN;VENUGOPAL, VIJAYAKUMAR
分类号	H01L21/3065;H01L21/00	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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