发明名称 Phase change memory device
摘要 A semiconductor device includes an insulating layer on a substrate, a first electrode in the insulating layer having a first upper surface and a second upper surface, a second electrode in the insulating layer spaced apart from the first electrode by a first distance and having a third upper surface and a fourth upper surface, the third upper surface being disposed at a substantially same level as the first upper surface, and the fourth upper surface being disposed at a substantially same level as the second upper surface, a first phase change material pattern covering a part of the first upper surface of the first electrode, and a second phase change material pattern covering a part of the third upper surface of the second electrode, wherein an interface region between the second phase change pattern and the second electrode is spaced apart from an interface region between the first phase change pattern and the first electrode by a second distance greater than the first distance.
申请公布号 US7906773(B2) 申请公布日期 2011.03.15
申请号 US20090382781 申请日期 2009.03.24
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KO SEUNG-PIL;OH JAE-HEE;PARK JUNG-HOON;SONG YOON-JONG;PARK JAE-HYUN;LIM DONG-WON
分类号 H01L21/00 主分类号 H01L21/00
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