发明名称 APPARATUS AND METHOD FOR MANUFACTURING SILICON
摘要 PURPOSE: An apparatus and method for manufacturing silicon are provided to manufacture spherical shaped silicon or polygonal shaped silicon by forming the protruded part of a graphite plug into a cylindrical or a polygonal shape. CONSTITUTION: In an apparatus and a method for manufacturing silicon, a crucible(20) accommodating silicon-melted solution is installed inside a chamber(10). A heater(50) heats the crucible. A graphite plug(30) includes a jig and a plate which are connected to the top surface inside the chamber. A movable part(80) moves the graphite plug up and down. A controller outside the chamber transfers the movable part in a horizontal direction.
申请公布号 KR20110026251(A) 申请公布日期 2011.03.15
申请号 KR20090084062 申请日期 2009.09.07
申请人 KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY 发明人 YANG, MIN YANG;KIM, SEONG BEOM;YOUN, HONG SEOK;JEON, KANG MIN
分类号 H01L21/20 主分类号 H01L21/20
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