| 发明名称 |
TELECENTRICITY CORRECTOR FOR MICROLITHOGRAPHIC PROJECTION SYSTEM |
| 摘要 |
<p>A telecentricity corrector is incorporated into a microlithographic projection system to achieve telecentricity targets at the output of the microlithographic projection system. The telecentricity corrector is located between an illuminator and a projection lens of the projection system, preferably just in advance of a reticle for controlling angular distributions of light illuminating the reticle.</p> |
| 申请公布号 |
KR20110026496(A) |
申请公布日期 |
2011.03.15 |
| 申请号 |
KR20117002297 |
申请日期 |
2009.06.25 |
| 申请人 |
CORNING INCORPORATED |
发明人 |
CORNELL JIM D.;MALACH JOSEPH D.;MICHALOSKI PAUL F.;WEBB JAMES E. |
| 分类号 |
G03F7/20;G02B13/22;G02B27/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
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