PROBE UNIT HAVING BUFFER LAYER WITH HIGH ELASTICITY UNDER CANTILEVERS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A probe unit having buffer layer with a high elasticity under a cantilevers and a manufacturing method thereof are provided to minimize the interference between adjacent cantilevers by forming a buffer between the bottom of the cantilevers and the top side of a lower substrate. CONSTITUTION: In a probe unit having buffer layer with a high elasticity under a cantilevers and a manufacturing method thereof, an upper substrate includes a bulk part(140), a fan portion(150), a cantilever(160), and a tip part(180). The bulk part has enough thickness to support the fan portion and a plurality of cantilevers. The fan part is extended from the one side of the bulk part. A buffer unit(240) is arranged between the bottom of the cantilevers and a lower substrate(210).