ETCHANT FOR THIN FILM TRANSISTOR-LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: An etching composition is provided to ensure uniform etching and excellent stability and to solve uneven etching generated by high viscosity which is a disadvantage of phosphorus-based etching composition. CONSTITUTION: An etching composition of a metal layer includes an organic chelating agent with an amino group and a carboxyl group; perfluorinated compounds; oxidizing agents; fluorine-containing compound, glycohols, additives and deionized water. The perfluorinated compounds is one kind or more selected from EDTA(ethylenediaminetetraacetic acid), iminodiacetic acid, nitrilotriacetic acid, and diethylene trinitrilopentaacetic acid(DTPA).