发明名称 |
TARGET FOR X-RAY GENERATION, X-RAY GENERATOR, AND METHOD FOR PRODUCING TARGET FOR X-RAY GENERATION |
摘要 |
A target for X-ray generation has a substrate and a target portion. The substrate is comprised of diamond and has a first principal surface and a second principal surface opposed to each other. A bottomed hole is formed from the first principal surface side in the substrate. The target portion is comprised of a metal deposited from a bottom surface of the hole toward the first principal surface. An entire side surface of the target portion is in close contact with an inside surface of the hole.
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申请公布号 |
US2011058655(A1) |
申请公布日期 |
2011.03.10 |
申请号 |
US20100871192 |
申请日期 |
2010.08.30 |
申请人 |
TOKYO ELECTRON LIMITED;HAMAMATSU PHOTONICS K.K. |
发明人 |
OKUMURA KATSUYA;KADOSAWA KATSUJI;KIYOMOTO TOMOFUMI;SUYAMA MOTOHIRO;ISHII ATSUSHI |
分类号 |
H01J35/08;B05D3/06;B05D5/00 |
主分类号 |
H01J35/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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